130 nm process

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Semiconductor device fabrication
MOSFET scaling (process nodes)
010 µm – 1971 006 µm – 1974 003 µm – 1977  1.5 µm – 1981 001 µm – 1984 800 nm – 1987 600 nm – 1990 350 nm – 1993 250 nm – 1996 180 nm – 1999 130 nm – 2001 090 nm – 2003 065 nm – 2005 045 nm – 2007 032 nm – 2009 022 nm – 2012 014 nm – 2014 010 nm – 2016 007 nm – 2018 005 nm – 2020
Future 003 nm ~ 2022 002 nm ~ 2024
Half-nodes Density CMOS Device (multi-gate) Moore's law Transistor count Semiconductor Industry Nanoelectronics
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The 130 nm (0.13 µm) process refers to the level of MOSFET (CMOS) semiconductor process technology that was commercialized around the 2001–2002 timeframe, by leading semiconductor companies like Fujitsu,^[1] IBM, Intel, Texas Instruments, and TSMC.

The origin of the 130 nm value is historical, as it reflects a trend of 70% scaling every 2–3 years. The naming is formally determined by the International Technology Roadmap for Semiconductors (ITRS).

Some of the first CPUs manufactured with this process include Intel Tualatin family of Pentium III processors.

Background[]

Their first MOSFET demonstrated by Egyptian engineer Mohamed Atalla and Korean engineer Dawon Kahng in 1960 had a gate length of 20 μm and a gate oxide thickness of 100 nm.^[2] In 1984, a MOSFET based on NMOS logic was fabricated with a 100 nm channel length by Toshio Kobayashi, Seiji Horiguchi and K. Kiuchi at Nippon Telegraph and Telephone (NTT) in Japan.^[3]

In 1990, a 100 nm CMOS process was demonstrated by an IBM T.J. Watson Research Center team led by Iranian engineers Ghavam G. Shahidi and Bijan Davari and Taiwanese engineer Yuan Taur.^[4] In 2001, 100 nm CMOS nodes were commercialized by Fujitsu^[1] and IBM.

Processors using 130 nm manufacturing technology[]

• Fujitsu SPARC64 V – 2001^[5]
• Gekko by IBM and Nintendo (GameCube console) – 2001
• Motorola PowerPC 7447 and 7457 – 2002
• IBM PowerPC G5 970 – October 2002 – June 2003
• Intel Pentium III Tualatin – 2001-04
• Intel Celeron Tualatin-256 – 2001-10-02
• Intel Pentium M Banias – 2003-03-12
• Intel Pentium 4 Northwood – 2002-01-07
• Intel Celeron Northwood-128 – 2002-09-18
• Intel Xeon Prestonia and Gallatin – 2002-02-25
• VIA C3 – 2001
• AMD Athlon XP Thoroughbred, Thorton, and Barton
• AMD Athlon MP Thoroughbred – 2002-08-27
• AMD Athlon XP-M Thoroughbred, Barton, and Dublin
• AMD Duron Applebred – 2003-08-21
• AMD K7 Sempron Thoroughbred-B, Thorton, and Barton – 2004-07-28
• AMD K8 Sempron Paris – 2004-07-28
• AMD Athlon 64 Clawhammer and Newcastle – 2003-09-23
• AMD Opteron Sledgehammer – 2003-06-30
• Elbrus 2000 1891ВМ4Я (1891VM4YA) – 2008-04-27 ^[6]
• MCST-R500S 1891BM3 – 2008-07-27 ^[7]
• Vortex 86SX^[8]

References[]

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