List of MEMS foundries
The list below provides a comprehensive overview of companies that develop and fabricate MEMS (microelectromechanical systems) devices. These companies are usually referred to the concept of foundries. The offer of the companies varies according to the used material, the production volume and the size of the wafers used for the fabrication.
Company | Service | Substrate materials | Production volume | Wafer diameters (in inches) | Type | Headquartered country
| |
---|---|---|---|---|---|---|---|
Asia Pacific Microsystems, Inc. | MEMS Foundry | Silicon, Sapphire, SOI, Glass, Quartz, Polymer, CMOS-wafers | High volume production | 6 | Pure-play | ![]() | |
Atomica | MEMS, biochip, and photonics manufacturing, including custom design, development, prototyping, and high volume production | Silicon, SOI, borosilicate, fused silica, quartz, glass, piezo, and engineered substrates | High volume production | 6, 8 | Pure-play | ![]() | |
Bosch | Customized MEMS process development and manufacturing. Optional: design, assembly, test, integration | Silicon, SOI, Fused silica or glass, post-processing on 200mm-CMOS wafers | Prototyping, development, medium and high volume | 6, 8 | IDM | ![]() | |
CEA-LETI | Customized MEMS, NEMS, BioMEMS: design, process, manufacturing, characterization, and packaging | Silicon, SOI, glass, and CMOS-wafers. | R&D recurrent batches and pilot line | 8, 12 | Pure-play | ![]() | |
CSEM | MEMS design & process development, Lab-to-Fab approach. Focus areas include photonics, microfluidics, watch components, and harsh environments. Lithium niobate and silicon carbide processing are notable technology bricks. | Silicon, SOI, lithium niobate, silicon carbide, fused silica, quartz, glass. | Prototyping, small & medium volume production | 6 | Pure-play | ![]() | |
Hanking Electronics | Class 100 MEMS Foundry Services, MEMS IMUs (6 DoF accelerometers/ gyroscopes), IoT modules and MEMS Design Services. Foundry processes include; Film Deposition, Metal Deposition, Thermal, Wafer Bonding, Etch processes including DRIE and VHF, Wet Processes, and Wafer Level Packaging. | Silicon | High volume production | 8 | IDM | ![]() | |
Honeywell | MEMS manufacturing and design | Silicon | High volume production | 4, 6 | IDM | ![]() | |
IMEC | Low-medium volume MEMS manufacturing (CMOS compatible), incl. custom design, development, post-processing and prototyping | Si, SOI, fused silica or glass; post-processing on CMOS wafers (8-inch to 12-inch ) | Prototyping, low and medium volume production; transfer to foundry for high volume | 8, 12 | Pure-play | ![]()
| |
iX-factory now Micronit GmbH since 03/2016 | Customised MEMS design and manufacturing | Silicon and SOI, borosilicate glass or quartz, structured wafer | Prototyping and middle-sized batch production | 6, 8 | Pure-play | ![]() | |
LioniX International | Customized MEMS design, custom process development, prototyping and production. | Silicon, SOI, fused silica, borosilicate glasses, thermally oxidized silicon. | Proof of concept, prototyping, pilot
production, small and medium volumes. |
4, 6 | Pure-play | ![]() | |
Nanoshift LLC | Contracted R&D and manufacturing with extensive experience in processing and integration. Specialize in MEMS, microfluidics, silicon photonics, TSV, CMOS integration, and other emerging technologies. | Silicon, SOI, Glass, flex substrates, polymer, and other materials. | Proof of concept, process development, prototyping, low to mid volume | 2, 3, 4, and 6 | IDM | ![]() | |
SCL | CMOS & MEMS design, manufacturing and packaging; microfabrication | Silicon, SOI and various glasses | From Low volume production | 6,8 | Pure-play | ![]() | |
Mapper | MEMS process development and manufacturing | Silicon, SOI and various glasses, piezoelectric materials | Low volume and prototyping | 4 | Pure-play | ![]() | |
Microfluidic Foundry | BioMEMS design and manufacturing | Silicon, Glass, SU8/PDMS, Polymer | R&D, Mini volume production | IDM | ![]() | ||
NaugaNeedles, LLC.(NN) | MEMS foundry, MEMS manufacturing | Glass Wafers, Quartz Wafers, Silicon Wafers, Structured Wafers, SOI Wafers and bonding material. | High volume production | 6 | Pure-play | ![]() | |
nanoPHAB | Micro- and Nano-fabrication services, nano-MEMS manufacturing, ASIC | III-V materials, GaAs, InP, Si, Oxi-Nitrides, Glass, Polymers, Multimaterials | Epi-growth, Prototyping and Consultancy. Low to medium volume production. Bridge to high volume. | 2, 3, 4 | Pure-Play | ![]() | |
NEMS and MEMS Proto Fab (NMPF) | MEMS manufacturing, microfabrication services | Silicon, Glass, Quartz, SOI wafers | Low to medium volume and prototyping | 2, 4 | Pure play | ![]() | |
Philips MEMS Foundry | Customized MEMS and Micro Assembly, process design and manufacturing, certified for medical devices | Silicon, SOI, glass, quartz and CMOS-wafers. | Prototyping, low and medium volume production | 6, 8 | Pure-play | ![]() | |
Semefab | MEMS manufacturing | High volume production | 4, 6 | Pure-play | ![]() | ||
Sensera | MEMS & microfabrication services | Prototyping, low, medium volume & bridge to high volume production | 6 ; ancillary micro-fabrication services | Pure-play | ![]() | ||
Silex Microsystems | MEMS process development and manufacturing | Silicon, SOI, Glass | Prototyping and high volume production | 8 | Pure-play | ![]() | |
SINTEF MiNaLab | Customized MEMS, BioMEMS, piezoMEMS and Micro-optics. Modeling and design, process development, testing and characterization. | Silicon, SOI, Glass | Prototyping, low and medium volume production; transfer to foundry for high volume | 6 | Pure-play | ![]() | |
SONY | MEMS development and manufacturing | Silicon, SOI | Prototyping and high volume production | 6, 8 | IDM | ![]() | |
STMicroelectronics | MEMS (including accelerometers, gyroscopes, digital compasses, inertial modules, pressure sensors, humidity sensors and microphones) | Silicon | High volume production | IDM | ![]() | ||
Teledyne DALSA | MEMS design and manufacturing with integration of individual foundry processes | Silicon and polysilicon | High volume production | 6, 8 | Pure-play | ![]() | |
Teledyne Micralyne | MEMS design, manufacturing and packaging; microfabrication | Silicon, SOI and various glasses | From scale-up to high volume production | 6 | Pure-play | ![]() | |
Texas Instruments | MEMS design and manufacturing | Silicon | High volume production | IDM | ![]() | ||
Tower Jazz | IC manufacturing | Silicon | High volume production | 6, 8 | Pure-play | ![]() | |
Tronics | MEMS design and manufacturing | Silicon, SOI and glass wafer | Prototyping, low and high volume production | 6 | Pure-play | ![]() ![]() | |
TSMC | MEMS design and manufacturing | Silicon | High volume production | 6, 8, 12 | Pure-play | ![]() | |
uFluidix | MEMS and Microfluidics manufacturing | Silicon, glass, PDMS | Low-Medium volume production | Pure-play | ![]() | ||
UMC | MEMS manufacturing | Silicon | High volume production | 8 | Pure-play | ![]() | |
Wunderlichips | focus on PDMS devices, process development | Silicon, SU8\PDMS | R&D, low volume | 4, 6, 8 | Pure-play | ![]() | |
Xfab | MEMS design and manufacturing | Silicon and glass | High volume production | 6, 8 | Pure-play | ![]() | |
MEMSCAP | MEMS manufacturing | Bulk Micromachining: Silicon, SOI
Surface Micromachining: Polysilicon, Nitride, Oxide, PSG Thick Metal processing: Cu, Au, Ni and Pt |
Prototyping, low, medium and high volume production | 6 | Pure-play | ![]() |
Categories:
- Microelectronic and microelectromechanical systems
- Lists of manufacturers