List of MEMS foundries

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The list below provides a comprehensive overview of companies that develop and fabricate MEMS (microelectromechanical systems) devices. These companies are usually referred to the concept of foundries. The offer of the companies varies according to the used material, the production volume and the size of the wafers used for the fabrication.

Company Service Substrate materials Production volume Wafer diameters (in inches) Type Headquartered country


Asia Pacific Microsystems, Inc. MEMS Foundry Silicon, Sapphire, SOI, Glass, Quartz, Polymer, CMOS-wafers High volume production 6 Pure-play  Taiwan
Atomica MEMS, biochip, and photonics manufacturing, including custom design, development, prototyping, and high volume production Silicon, SOI, borosilicate, fused silica, quartz, glass, piezo, and engineered substrates High volume production 6, 8 Pure-play  United States
Bosch Customized MEMS process development and manufacturing. Optional: design, assembly, test, integration Silicon, SOI, Fused silica or glass, post-processing on 200mm-CMOS wafers Prototyping, development, medium and high volume 6, 8 IDM  Germany
CEA-LETI Customized MEMS, NEMS, BioMEMS: design, process, manufacturing, characterization, and packaging Silicon, SOI, glass, and CMOS-wafers. R&D recurrent batches and pilot line 8, 12 Pure-play  France
CSEM MEMS design & process development, Lab-to-Fab approach. Focus areas include photonics, microfluidics, watch components, and harsh environments. Lithium niobate and silicon carbide processing are notable technology bricks. Silicon, SOI, lithium niobate, silicon carbide, fused silica, quartz, glass. Prototyping, small & medium volume production 6 Pure-play   Switzerland
Hanking Electronics Class 100 MEMS Foundry Services, MEMS IMUs (6 DoF accelerometers/ gyroscopes), IoT modules and MEMS Design Services. Foundry processes include; Film Deposition, Metal Deposition, Thermal, Wafer Bonding, Etch processes including DRIE and VHF, Wet Processes, and Wafer Level Packaging. Silicon High volume production 8 IDM  China
Honeywell MEMS manufacturing and design Silicon High volume production 4, 6 IDM  United States
IMEC Low-medium volume MEMS manufacturing (CMOS compatible), incl. custom design, development, post-processing and prototyping Si, SOI, fused silica or glass; post-processing on CMOS wafers (8-inch to 12-inch ) Prototyping, low and medium volume production; transfer to foundry for high volume 8, 12 Pure-play  Belgium


iX-factory now Micronit GmbH since 03/2016 Customised MEMS design and manufacturing Silicon and SOI, borosilicate glass or quartz, structured wafer Prototyping and middle-sized batch production 6, 8 Pure-play  Germany
LioniX International Customized MEMS design, custom process development, prototyping and production. Silicon, SOI, fused silica, borosilicate glasses, thermally oxidized silicon. Proof of concept, prototyping, pilot

production, small and medium volumes.

4, 6 Pure-play  Netherlands
Nanoshift LLC Contracted R&D and manufacturing with extensive experience in processing and integration. Specialize in MEMS, microfluidics, silicon photonics, TSV, CMOS integration, and other emerging technologies. Silicon, SOI, Glass, flex substrates, polymer, and other materials. Proof of concept, process development, prototyping, low to mid volume 2, 3, 4, and 6 IDM  United States
SCL CMOS & MEMS design, manufacturing and packaging; microfabrication Silicon, SOI and various glasses From Low volume production 6,8 Pure-play  India
Mapper MEMS process development and manufacturing Silicon, SOI and various glasses, piezoelectric materials Low volume and prototyping 4 Pure-play  Russia
Microfluidic Foundry BioMEMS design and manufacturing Silicon, Glass, SU8/PDMS, Polymer R&D, Mini volume production IDM  United States
NaugaNeedles, LLC.(NN) MEMS foundry, MEMS manufacturing Glass Wafers, Quartz Wafers, Silicon Wafers, Structured Wafers, SOI Wafers and bonding material. High volume production 6 Pure-play  United States
nanoPHAB Micro- and Nano-fabrication services, nano-MEMS manufacturing, ASIC III-V materials, GaAs, InP, Si, Oxi-Nitrides, Glass, Polymers, Multimaterials Epi-growth, Prototyping and Consultancy. Low to medium volume production. Bridge to high volume. 2, 3, 4 Pure-Play  Netherlands
NEMS and MEMS Proto Fab (NMPF) MEMS manufacturing, microfabrication services Silicon, Glass, Quartz, SOI wafers Low to medium volume and prototyping 2, 4 Pure play  India
Philips MEMS Foundry Customized MEMS and Micro Assembly, process design and manufacturing, certified for medical devices Silicon, SOI, glass, quartz and CMOS-wafers. Prototyping, low and medium volume production 6, 8 Pure-play  Netherlands
Semefab MEMS manufacturing High volume production 4, 6 Pure-play  United Kingdom
Sensera MEMS & microfabrication services Prototyping, low, medium volume & bridge to high volume production 6 ; ancillary micro-fabrication services Pure-play  United States
Silex Microsystems MEMS process development and manufacturing Silicon, SOI, Glass Prototyping and high volume production 8 Pure-play  Sweden
SINTEF MiNaLab Customized MEMS, BioMEMS, piezoMEMS and Micro-optics. Modeling and design, process development, testing and characterization. Silicon, SOI, Glass Prototyping, low and medium volume production; transfer to foundry for high volume 6 Pure-play  Norway
SONY MEMS development and manufacturing Silicon, SOI Prototyping and high volume production 6, 8 IDM  Japan
STMicroelectronics MEMS (including accelerometers, gyroscopes, digital compasses, inertial modules, pressure sensors, humidity sensors and microphones) Silicon High volume production IDM   Switzerland
Teledyne DALSA MEMS design and manufacturing with integration of individual foundry processes Silicon and polysilicon High volume production 6, 8 Pure-play  Canada
Teledyne Micralyne MEMS design, manufacturing and packaging; microfabrication Silicon, SOI and various glasses From scale-up to high volume production 6 Pure-play  Canada
Texas Instruments MEMS design and manufacturing Silicon High volume production IDM  United States
Tower Jazz IC manufacturing Silicon High volume production 6, 8 Pure-play  Israel
Tronics MEMS design and manufacturing Silicon, SOI and glass wafer Prototyping, low and high volume production 6 Pure-play  France
 United States
TSMC MEMS design and manufacturing Silicon High volume production 6, 8, 12 Pure-play  Taiwan
uFluidix MEMS and Microfluidics manufacturing Silicon, glass, PDMS Low-Medium volume production Pure-play  Canada
UMC MEMS manufacturing Silicon High volume production 8 Pure-play  Taiwan
Wunderlichips focus on PDMS devices, process development Silicon, SU8\PDMS R&D, low volume 4, 6, 8 Pure-play   Switzerland
Xfab MEMS design and manufacturing Silicon and glass High volume production 6, 8 Pure-play  Germany
MEMSCAP MEMS manufacturing Bulk Micromachining: Silicon, SOI

Surface Micromachining: Polysilicon, Nitride, Oxide, PSG

Thick Metal processing: Cu, Au, Ni and Pt

Prototyping, low, medium and high volume production 6 Pure-play  France
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