1 µm process
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Semiconductor device fabrication |
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MOSFET scaling (process nodes) |
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The 1 μm process refers to the level of MOSFET semiconductor process technology that was commercialized around the 1984–1986 timeframe,[1][2] by leading semiconductor companies like NTT, NEC, Intel and IBM. It was the first process where CMOS was common (as opposed to NMOS).
The earliest MOSFET with a 1 μm NMOS channel length was fabricated by a research team led by Robert H. Dennard, Hwa-Nien Yu and F.H. Gaensslen at the IBM T.J. Watson Research Center in 1974.[3]
Products featuring 1.0 μm manufacturing process[]
- NTT introduced the 1 μm process for its DRAM memory chips, including its 64 kbit chip in 1979 and 256 kbit chip in 1980.[4]
- NEC's 1 Mbit DRAM memory chip was manufactured with the 1 μm process in 1984.[5]
- Intel 80386 CPU launched in 1985 was manufactured using this process.[6]
References[]
- ^ Mueller, S (2006-07-21). "Microprocessors from 1971 to the Present". informIT. Archived from the original on 2015-04-27. Retrieved 2012-05-11.
- ^ Myslewski, R (2011-11-15). "Happy 40th birthday, Intel 4004!". TheRegister. Archived from the original on 2015-04-27. Retrieved 2015-04-19.
- ^ Dennard, Robert H.; Yu, Hwa-Nien; Gaensslen, F. H.; Rideout, V. L.; Bassous, E.; LeBlanc, A. R. (October 1974). "Design of ion-implanted MOSFET's with very small physical dimensions" (PDF). IEEE Journal of Solid-State Circuits. 9 (5): 256–268. Bibcode:1974IJSSC...9..256D. doi:10.1109/JSSC.1974.1050511. S2CID 283984.
- ^ Gealow, Jeffrey Carl (10 August 1990). "Impact of Processing Technology on DRAM Sense Amplifier Design" (PDF). Massachusetts Institute of Technology. pp. 149–166. Retrieved 25 June 2019 – via CORE.
- ^ "Memory". STOL (Semiconductor Technology Online). Retrieved 25 June 2019.
- ^ Mueller, S (2006-07-21). "Microprocessors from 1971 to the Present". informIT. Archived from the original on 2015-04-27. Retrieved 2012-05-11.
External links[]
Preceded by 1.5 μm process |
MOSFET semiconductor device fabrication process | Succeeded by 800 nm process |
Categories:
- International Technology Roadmap for Semiconductors lithography nodes
- Nanotechnology stubs